Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Calibration of B-A Type Ionization Gauges Using Spinning Rotor Viscosity Gauge
Kenji ODAKAMuneo FURUSEYuuichi ISHIKAWA
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1985 Volume 28 Issue 5 Pages 244-246

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© The Vacuum Society of Japan
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