Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
LIFS Measurement of Sputtering Particle Density by Plasma Irradiation to a Metal Sample
Kiyohiko OKAZAKI, Arimichi MINOH, Shigeyuki ISHII, Yukio ISHIBE, Hitoshi OYAMA, Yuichi SAKAMOTO, Katsuki YANO
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1985 Volume 28 Issue 5 Pages 388-391

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