Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Characteristics of Silicide Thin Films Prepared by Sputtering Using Hot Pressed Target
Hidekazu YOSHIHARA, Hiroaki KITAHARA, Naokichi HOSOKAWA
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JOURNAL FREE ACCESS

1985 Volume 28 Issue 5 Pages 418-420

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