Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Zr-N Films Sputter Deposited in Pure Nitrogen
Masaaki YOSHITAKE, Soichi OGAWA, Katsumi TAKIGUCHI
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1987 Volume 30 Issue 5 Pages 367-370

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