Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Preparation of Titanium Carbide Films by Plasma-Enhanced Chemical Vapor Deposition
Saburo KIMURA, Kenji KOBAYASHI, Shoichi MOCHIZUKI, Ryoji MAKABE, Osamu TABATA
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1987 Volume 30 Issue 5 Pages 454-457

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