Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Ta2O5 Thin Films Preparation of Reactive Neutral Beam Sputter
Study on Effects of N2 Gas
Tsunemi OHIWA, Takayuki OKAMOTO, Katsumi TAKIGUCHI, Sochi OGAWA, Masaaki YOSHITAKE
Author information
JOURNAL FREE ACCESS

1987 Volume 30 Issue 5 Pages 504-507

Details
Download PDF (369K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© The Vacuum Society of Japan
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top