Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Electron Beam Effect in High Efficiency Sheet Plasma Type-Volume Produced H-, D- Ion Source
Joshin URAMOTO
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1988 Volume 31 Issue 1 Pages 4-10

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Abstract
When a high efficiency (electric power and gas efficiency) sheet plasma is shaped by arranging two rectangular permanent magnets on both sides of a cyclindrical plasma (produced by H2 gas discharge along a uniform magnetic field), a local voltage above 30 V can be kept between the cylindrical plasma and the sheet plasma, which accelerates electrons (that is, produces an electron beam sheet over a large surface). Then, an H- ion current extracted from outside of the sheet plasma increases abruptly with the local voltage. We estimate from this experimental fact that a vibrationally excited H2 gas with a high density is produced by the electron beam sheet with a high electron density and high energy (>30 eV).
This characteristics of the sheet plasma much improves a gas efficiency and a discharge power efficiency as volume produced H-, D- ion source for high cuurent density and large area, compared with bucket (multi-cusp) type plasmas and reflex discharge (Penning) type plasmas.
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© The Vacuum Society of Japan
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