Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Attainment of Extreme High Vaccum (10-10 Pa) by Titanium Getter Pump
Muneo FURUSEYuichi ISHIKAWAShinnjiroo UEDAHideaki KAMOHARA
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1988 Volume 31 Issue 5 Pages 315-318

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© The Vacuum Society of Japan
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