Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Electron Beam Oxidation of Semiconductors
Takao WADAZhizhan YUMichihiko TAKEDANoboru KITAMURA
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1988 Volume 31 Issue 5 Pages 436-440

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© The Vacuum Society of Japan
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