Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Hard Carbon Film Coating by Plasma CVD
Mikio KOBAYAKAWA, Seita TANEMURA, Hiroaki NIWA, Kazuo SAITOH
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1988 Volume 31 Issue 5 Pages 498-502

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