Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Post-Sputter Annealing in Vacuum of ZnO : Al Films Prepared by rf Reactive Sputtering
Yasuhiro IGASAKI, Naomi INOUE, Shoji TSUTSUI, Goro SHIMAOKA
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1988 Volume 31 Issue 5 Pages 511-514

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