Abstract
A multilayer consisting of six layer pairs of C (113.5 Å) and W (25 Å) has been designed and fabricated by sputtering method for a multilayer-coated mirror which was used as the first diffracting element of the Grating/Crystal Monochromator (GCM) installed at beam line 1A of the Photon Factory for soft X-ray monochromatization. Transmission function of GCM using the multilayer-coated mirror in combination with a grating (2400 g/mm) in the photon energy region 400-1000 eV has been evaluated by means of Au photocathode placed at the beam line end. The increase of monochromatized beam flux was observed at about 850 eV in the transmission function. A comparison between the obtained transmission function and the calculated reflectivity of the W/C multilayer demonstrates that this phenomena is caused by diffraction effect of the W/C multilayer.
