Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Preparation of Aluminum-Doped Zinc-Oxide Films by Reactive rf Magunetron Sputtering using Al-Zn Metal Target
Naomi INOUE, Yasuhiro IGASAKI, Osamu KUBOYAMA
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1989 Volume 32 Issue 3 Pages 251-254

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