Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Simplified Reconstruction of Target Holder for Magnerton Sputtering
Yasuhiro IGASAKINaomi INOUE
Author information
JOURNAL FREE ACCESS

1989 Volume 32 Issue 3 Pages 301-304

Details
Article 1st page
Content from these authors
© The Vacuum Society of Japan
Previous article Next article
feedback
Top