Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
He Pumping Characteristics of a Cryopump with Condensed Layer of Nitrogen
Yasushi IWASATakao UCHIDANobuo TACHIKAWA
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1989 Volume 32 Issue 3 Pages 381-384

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© The Vacuum Society of Japan
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