Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Capability of Obtaining Extreme High Vacuum by Commercial G-M refrigerator-Cooled Cryopump
Toshio KIKUCHINobuharu OHSAKOYoshitaka HAYASHI
Author information
JOURNAL FREE ACCESS

1990 Volume 33 Issue 3 Pages 160-162

Details
Article 1st page
Content from these authors
© The Vacuum Society of Japan
Previous article Next article
feedback
Top