Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Eeffects of Zn Diffusion into ZnO : Al Thin Films Prepared by rf Reactive Sputtering
Yasuhiro IGASAKIHiromi SAITO
Author information
JOURNAL FREE ACCESS

1990 Volume 33 Issue 3 Pages 194-197

Details
Article 1st page
Content from these authors
© The Vacuum Society of Japan
Previous article Next article
feedback
Top