Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Production of Extreme High Vacuum using a New-Bakeable Type Cryopump with G-M Refrigerators
Yutaka MATSUI, Kazuo YUI, Guohua SHEN, Hiroyuki YAMAKAWA
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1991 Volume 34 Issue 1 Pages 37-40

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