Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Accurate Control of Surface Characteristics of Glassy Carbon by Hybrid Plasma Treatment
Takeo OHTESugio OHTANIAkira KOJIMAMasaaki KATOH
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1993 Volume 36 Issue 3 Pages 211-214

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© The Vacuum Society of Japan
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