Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Measurement of the Hydrogen Pumping Characteristics of a Bakeable Circulation-Refrigerator-Cryopump
Takao ARAIKyoko TAKEUCHIYutaka TUZIYutaka MATSUIHiroyuki YAMAKAWATatsuo OKANO
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1993 Volume 36 Issue 3 Pages 245-248

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© The Vacuum Society of Japan
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