Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Floating Potential of a Substance Mounted on Grounded Electrode in 1MHz RF Discharge
Hidehiko KOBAYASHI, Itsuo ISHIKAWA, Kazuya NAGASEKI, Shinji SUGANOMATA
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1993 Volume 36 Issue 3 Pages 299-302

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