Preparation of Polymer Thin Films by Reactive Sputtering of PPS

Shinku

Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516

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Volume 36 (1993) Issue 4
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Preparation of Polymer Thin Films by Reactive Sputtering of PPS

Kaoru SHIBATA, Tsuyoshi HAGIO, Hisayoshi YOSHIDA

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JOURNAL FREE ACCESS

1993 Volume 36 Issue 4 Pages 424-426

DOI https://doi.org/10.3131/jvsj.36.424

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© The Vacuum Society of Japan

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