Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Preparation of Silicon Nitride Film by Sputtering Method (III)
Optical Emission Spectroscopy of Plasma
Naonobu SHIMAMOTO, Yuko HIROHATA, Masao HASHIBA, Tomoaki HINO, Toshiro YAMASHINA, Katsumasa YABE
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1993 Volume 36 Issue 7 Pages 615-618

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