Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Pump-down Characteristics of an Out gassed Clean Stainless Steel Vacuum Chamber
Atsutoshi MUTOHYuko HIROHATATomoaki HINOToshiro YAMASHINAToshio KIKUCHINobuharu OHSAKO
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1994 Volume 37 Issue 3 Pages 173-176

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© The Vacuum Society of Japan
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