Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
1 MHz Paral-Plellate Discharges in Etching Gases : CF4 and SF6
Hidehiko KOBAYASHI, Hideki KUSUNOKI, Itsuo ISHIKAWA, Kazuya NAGASEKI, Yukinori SAITO, Shinji SUGANOMATA
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1994 Volume 37 Issue 3 Pages 308-311

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