Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Simulation of Erosion Rate Distribution on a Target used in a Magnetron Sputtering System
Tsukasa KOBAYASHI, Naokichi HOSOKAWA, Katsunori ITAGAKI, Tomoo UCHIYAMA
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1994 Volume 37 Issue 3 Pages 355-358

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