Abstract
On the basis of the axial-emission ionization gauge (AEG) and the oscillator mini-ion gauge (OMG), a mini-axial-emission ionization gauge (MAEG) with a needle collector and a small ring anode has been developed. Due to the confinement of the electrostatic saddle field around the anode ring, its sensitivity is high (3.9 Pa-1) and the X-ray limit is low the lower limiting pressure is about 1.2×10-10 Pa at Ie=100μA, Va=1000V, Vk=50V, Vs1=Vs2=0 and Vc=0.
Its small size and simple electrode construction than AEG makes degassing unnecessary, and its filament works at a lower temperature. All these make the MAEG more suitable for UHV measurement and even for XHV measurement. Furthermore, the upper limit of the MAEG can be extended to 6.7×10-2 Pa when Ie is decreased to 10μA and Vs1=50V.
