Oxygen Gettering Properties of Boron Film Made by Diborane Discharge

Shinku

Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516

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Volume 38 (1995) Issue 10
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Oxygen Gettering Properties of Boron Film Made by Diborane Discharge

Takahiro MOCHIZUKI, Ichiro FUJITA, Yuko HIROHATA, Tomoaki HINO, Toshiro YAMASHINA, Akio SAGARA, Nobuaki NODA, Osamu MOTOJIMA, Kazuhiro TSUZUKI, Muhamad NATSIR

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JOURNAL FREE ACCESS

1995 Volume 38 Issue 10 Pages 865-868

DOI https://doi.org/10.3131/jvsj.38.865

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© The Vacuum Society of Japan

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