Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Improvement on the Target Structure in a Cylindrical Magnetron Sputtering Apparatus
Tadao KANEKO, Mieko SAKURAI, Osamu NITTONO
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1995 Volume 38 Issue 8 Pages 714-717

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