Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Change of Chemical Bonding State at Interface between Cu Thin Film and Polyimide Substrate after Heat Treatment
Satoru IWAMORITakehiro MIYASHITAShin FUKUDANobuhiro FUKUDAKazufuyu SUDOH
Author information
JOURNAL FREE ACCESS

1996 Volume 39 Issue 1 Pages 7-10

Details
Article 1st page
Content from these authors
© The Vacuum Society of Japan
Previous article Next article
feedback
Top