Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Characterization and Control of Properties of Diamond Surface and Its Application to Electron Emitter
Akimitsu HATTAKenji OGAWAJiang NANHiromasa YAGINobuhiro EIMORIMasahiro DEGUCHIYusuke MORIMakoto KITABATAKEToshimichi ITOTakatomo SASAKIAkio HIRAKI
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1996 Volume 39 Issue 11 Pages 618-625

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Abstract
Negative electron affinity (NEA) of the diamond surface is expected to enable the realization of a stable and efficient electron emitter for microvacuum electronics devices and multiemitter display panels. We have studied the diamond surface by techniques such as photoemission spectroscopy, ion beam analysis, and high-resolution electron microscopy, and established the control of the electron affinity by hydrogenation or oxidation in plasma, or irradiation to vacuum ultraviolet light. The conductivity of the NEA surface should be taken into consideration, as well as the NEA feature itself, in the design of the structure of electron emitter devices with the hydrogenated diamond surface. In this paper, we present studies on diamond surfaces, and the design and characterization of an electron emitter using diamond thin film into which electrons have been injected for emission from the NEA surface.
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© The Vacuum Society of Japan
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