Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Analysis of the Plasma Surface Modification Mechanism by Using the Plasma Diagnosis
Masaaki KATOH, Akiko TAKAHASHI, Kiyoshi MIYASHITA, Takeo OHTE, Sugio OHTANI, Akira KOJIMA
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1997 Volume 40 Issue 5 Pages 442-445

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