サマリー・アブストラクト

湊 道夫; 伊藤 好男; 一村 信吾; 国分 清秀; 平田 正紘; 塚原 園子; 斉藤 一也; 池田 佳直; 斉藤 芳男; 渡邊 剛; 佐伯 宏; 正木 満博; 鈴木 康明; 谷内 友希子; 野田 隆; 前野 理生; 〓 碩喜; 大熊 春夫; 土佐 正弘; 笠原 章; 吉原 一紘; 菅野 誠一郎; 橘内 浩之; 妻木 伸夫; 中山 正昭; 西村 仁; 白井 賢治; 小林 信一; 荻原 徳男; 大平 恵一; 佐藤 隆幸; 道園 真一郎; 杉沼 茂実; 高橋 研; 岡本 昭夫; 野坂 俊紀; 吉竹 正明; 小川 倉一; 小林 和彦; 野口 正俊; 中島 秀文; 小原 宏之; 酒井 創; 小越 康弘; 小池 卓郎; 長谷川 秀雄; 井口 征夫; 鈴木 一弘; 大久保 治; 高橋 夏木; 寺井 真之; 長谷川 徳慶; 奥沢 昌彦; 大島 忠平; 大谷 茂樹; 尾高 憲二; 佐藤 修; 塩川 善郎; 市川 昌和; Kenya AKAISHI; Kazuhiro EZAKI; Yusuke KUBOTA; Osamu MOTOJIMA; 木谷 正克; 黒河 明; 加地 博子; 垣谷 公徳; 矢城 陽一朗; 吉森 昭夫; 青木 孝憲; 戸田 昌吾; 浜路 和昭; 鈴木 晶雄; 松下 辰彦; 奥田 昌宏; 田中 大介; 藤原 武; 前田 光章; 竹原 伸彦; 疋田 光孝; 伊ヶ暗 泰宏; 佐藤 彰繁; 北河 勝; 黒田 靖信; 草野 英二; 金原 あきら; 河内 泰三; 福谷 克之; 岡野 達雄; 岸本 俊二; 張 小威; 川崎 豊誠; 坂井 大輔; 井藤 浩志; 市ノ川 竹男; 大島 忠平; 安 東秀; 久保 洋士; 後藤 康仁; 辻 博司; 石川 順三; 山本 陽一; 御代川 俊明; 田村 伸昭; 三浦 忠男; 角谷 透; 藤沼 明子; 田中 俊一郎; 吉木 宏之; 筒井 照彦; 岡本 哲; 渡辺 成一; 岡本 幸雄; 川田 洋揮; 居島 薫; 水野 清義; 清水 三郎; 不破 耕; 関 整爾; 早川 和延; 徳高 平蔵; 岩本 和之; 藤村 喜久郎; 渡部 徹; 岸田 悟; 中村 健; 猪狩 佳幸; 石塚 真治; 峰 哲朗; 高岡 毅; 高見 知秀; 楠 勲; 羽山 彰; 井元 一好; 平山 孝人; 荒川 一郎; 安達 俊; 見附 孝一郎; 桜井 誠; 百瀬 丘; 早坂 英修; 斎藤 克宏; 永山 勝也; 安部 慎哉; 沖村 邦雄; 安丸 尚樹; 阿部 雪子; 五十嵐 慎一; 入江 泰雄; 鈴木 克己; 六田 英治; 林 智広; 伊藤 淳; 大島 忠平; 櫻井 利夫; 松本 益明; 辰己 夏生; 糸山 正; 楳澤 正臣

doi:10.3131/jvsj.41.335

[title in Japanese]

Michio MINATO, Yoshio ITOH, Shingo ICHIMURA, Kiyohide KOKUBUN, Masahiro HIRATA, Sonoko TSUKAHARA, Kazuya SAITO, Yoshinao IKEDA, Yoshio SAITO, Kowashi WATANABE, Hiroshi SAEKI, Mitsuhiro MASAKI, Yasuaki SUZUKI, Yukiko TANIUCHI, Takashi NODA, Michio MAENO, Suck Hee BE, Haruo OHKUMA, Masahiro TOSA, Akira KASAHARA, Kazuhiro YOSHIHARA, Seiichiro KANNO, Hiroyuki KITSUNAI, Nobuo TSUMAKI, Masaaki NAKAYAMA, Hitoshi NISHIMURA, Kenji SHIRAI, Shinichi KOBAYASHI, Norio OGIWARA, Keiichi OHIRA, Takayuki SATO, Shinichiro MICHIZONO, Shigemi SUGINUMA, Migaku TAKAHASHI, Akio OKAMOTO, Toshikazu NOSAKA, Masaaki YOSHITAKE, Souichi OGAWA, Kazuhiko KOBAYASHI, Masatoshi NOGUCHI, Hidefumi NAKAJIMA, Hiroyuki OBARA, Hajime SAKAI, Yasuhiro OGOSHI, Takuro KOIKE, Hideo HASEGAWA, Yukio INOKUTI, Kazuhiro SUZUKI, Osamu OHKUBO, Natsuki TAKAHASHI, Masayuki TERAI, Norichika HASEGAWA, Masahiko OKUZAWA, Chuhei OSHIMA, Shigeki OTANI, Kenji ODAKA, Osamu SATOH, Yoshiro SHIOKAWA, Masakazu ICHIKAWA, Kenya AKAISHI, Kazuhiro EZAKI, Yusuke KUBOTA, Osamu MOTOJIMA, Masakatsu KITANI, Akira KUROKAWA, Hiroko KAJI, Kiminori KAKITANI, Yoichiro YAGI, Akio YOSHIMORI, Takanori AOKI, Shogo TODA, Kazuaki HAMAJI, Akio SUZUKI, Tatsuhiko MATSUSHITA, Masahiro OKUDA, Daisuke TANAKA, Takeshi FUJIWARA, Mituaki MAEDA, Nobuhiko TAKEHARA, Mitsutaka HIKIDA, Yasuhiro IGASAKI, Akishige SATO, Masaru KITAGAWA, Yasunobu KURODA, Eiji KUSANO, Akira KINBARA, Taizo KAWAUCHI, Katsuyuki FUKUTANI, Tatsuo OKANO, Shunji KISHIMOTO, Xiaowei ZHANG, Toyosei KAWASAKI, Daisuke SAKAI, Hiroshi ITOH, Takeo ICHINOKAWA, Chuhei OSHIMA, Toshuu AN, Hiroshi KUBO, Yasuhito GOTOH, Hiroshi TSUJI, Junzo ISHIKAWA, Youiti YAMAMOTO, Toshiaki MIYOKAWA, Nobuaki TAMURA, Tadao MIURA, Touru SUMIYA, Haruko FUJINUMA, Shun-ichiro TANAKA, Hiroyuki YOSHIKI, Teruhiko TSUTSUI, Tetsu OKAMOTO, Seiichi WATANABE, Yukio OKAMOTO, Hiroki KAWADA, Kaoru IJIMA, Seigi MIZUNO, Saburo SHIMIZU, Koh FUWA, Seiji SEKI, Kazunobu HAYAKAWA, Heizo TOKUTAKA, Kazuyuki IWAMOTO, Kikuo FUJIMURA, Toru WATANABE, Satoru KISHIDA, Ken NAKAMURA, Yoshiyuki IGARI, Shinji ISHIDZUKA, Tetsuroh MINE, Tsuyoshi TAKAOKA, Tomohide TAKAMI, Isao KUSUNOKI, Akira HAYAMA, Kazuyoshi IMOTO, Takato HIRAYAMA, Ichiro ARAKAWA, Takashi ADACHI, Koichiro MITSUKE, Makoto SAKURAI, Takashi MOMOSE, Eishuu HAYASAKA, Katsuhiro SAITOU, Katsuya NAGAYAMA, Sin'ya ABE, Kunio OKIMURA, Naoki YASUMARU, Yukiko ABE, Sin-ichi IGARASHI, Yasuo IRIE, Katsumi SUZUKI, Eiji ROKUTA, Tomohiro HAYASHI, Atsushi ITO, Chuhei OSHIMA, Toshio SAKURAI, Masuaki MATSUMOTO, Natsuo TATSUMI, Tadashi ITOYAMA, Masaomi UMEZAWA

Author information

Michio MINATO
Vacuum Metallurgical Co., Ltd.
Yoshio ITOH
Vacuum Metallurgical Co., Ltd.
Shingo ICHIMURA
Electortechnical Laboratory
Kiyohide KOKUBUN
Electortechnical Laboratory
Masahiro HIRATA
Electortechnical Laboratory
Sonoko TSUKAHARA
ULVAC JAPAN LTD.
Kazuya SAITO
ULVAC JAPAN LTD.
Yoshinao IKEDA
ULVAC JAPAN LTD.
Yoshio SAITO
KEK-High Energy Accelerator Research Organization
Kowashi WATANABE
Japan Synchrotron Radiation Research Institute
Hiroshi SAEKI
Japan Synchrotron Radiation Research Institute
Mitsuhiro MASAKI
Japan Synchrotron Radiation Research Institute
Yasuaki SUZUKI
The Institute of Physical and Chemical Research
Yukiko TANIUCHI
The Institute of Physical and Chemical Research
Takashi NODA
The Institute of Physical and Chemical Research
Michio MAENO
Teikoku Electric MFG. CO., LTD.
Suck Hee BE
Korea Research Institute of Standards and Science
Haruo OHKUMA
The Institute of Physical and Chemical Research
Masahiro TOSA
National Research Institute for Metals
Akira KASAHARA
National Research Institute for Metals
Kazuhiro YOSHIHARA
National Research Institute for Metals
Seiichiro KANNO
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
Hiroyuki KITSUNAI
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
Nobuo TSUMAKI
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
Masaaki NAKAYAMA
Department of Applied Physics, Osaka City University
Hitoshi NISHIMURA
Department of Applied Physics, Osaka City University
Kenji SHIRAI
Department of Erectrical and Erectronic Systems Engineering, Saitama University
Shinichi KOBAYASHI
Department of Erectrical and Erectronic Systems Engineering, Saitama University
Norio OGIWARA
Japan Atomic Energy Research Institute
Keiichi OHIRA
Department of Erectrical and Erectronic Systems Engineering, Saitama University
Takayuki SATO
KEK-High Energy Accelerator Research Organization
Shinichiro MICHIZONO
KEK-High Energy Accelerator Research Organization
Shigemi SUGINUMA
Electortechnical Laboratory
Migaku TAKAHASHI
Dept of Electronics Engng., Tohoku University
Akio OKAMOTO
Technology Research Institute of Osaka Prefecture
Toshikazu NOSAKA
Technology Research Institute of Osaka Prefecture
Masaaki YOSHITAKE
Technology Research Institute of Osaka Prefecture
Souichi OGAWA
Technology Research Institute of Osaka Prefecture
Kazuhiko KOBAYASHI
Department of Mechanical Engineering Tamagawa University
Masatoshi NOGUCHI
Department of Mechanical Engineering Tamagawa University
Hidefumi NAKAJIMA
Department of Mechanical Engineering Tamagawa University
Hiroyuki OBARA
Department of Mechanical Engineering Tamagawa University
Hajime SAKAI
Fukushima Women's College
Yasuhiro OGOSHI
Fukushima Women's College
Takuro KOIKE
Department of Mechanical Engineering Tamagawa University
Hideo HASEGAWA
Department of Electrical Engineering, National Defense Academy
Yukio INOKUTI
Research Raboratories, Kawasaki Steel Corp.
Kazuhiro SUZUKI
Research Raboratories, Kawasaki Steel Corp.
Osamu OHKUBO
Industrial Equipment Division, ULVAC JAPAN, Ltd.
Natsuki TAKAHASHI
Industrial Equipment Division, ULVAC JAPAN, Ltd.
Masayuki TERAI
Waseda University
Norichika HASEGAWA
Waseda University
Masahiko OKUZAWA
Waseda University
Chuhei OSHIMA
Waseda University
Shigeki OTANI
National Institute for Research in Inorganic Materials
Kenji ODAKA
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
Osamu SATOH
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
Yoshiro SHIOKAWA
JRCAT-ATP
Masakazu ICHIKAWA
JRCAT-ATP
Kenya AKAISHI
National Institute for Fusion Science
Kazuhiro EZAKI
National Institute for Fusion Science
Yusuke KUBOTA
National Institute for Fusion Science
Osamu MOTOJIMA
National Institute for Fusion Science
Masakatsu KITANI
Department of Erectrical and Erectronic Systems Engineering, Saitama University
Akira KUROKAWA
Electortechnical Laboratory
Hiroko KAJI
Department of Electronic Engineering, Okayama University of Science
Kiminori KAKITANI
Department of Electronic Engineering, Okayama University of Science
Yoichiro YAGI
Department of Simulation Physics, Okayama University of Science
Akio YOSHIMORI
Department of Electronic Engineering, Okayama University of Science
Takanori AOKI
Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
Shogo TODA
Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
Kazuaki HAMAJI
Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
Akio SUZUKI
Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
Tatsuhiko MATSUSHITA
Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
Masahiro OKUDA
Department of Physics and Electronics, College of Engineering, University of Osaka Prefecture
Daisuke TANAKA
Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
Takeshi FUJIWARA
Graduate School of Electronic Science and Technology, Shizuoka University
Mituaki MAEDA
Graduate School of Electronic Science and Technology, Shizuoka University
Nobuhiko TAKEHARA
Graduate School of Electronic Science and Technology, Shizuoka University
Mitsutaka HIKIDA
Graduate School of Electronic Science and Technology, Shizuoka University
Yasuhiro IGASAKI
Graduate School of Electronic Science and Technology, Shizuoka University
Akishige SATO
AMSRC, Kanazawa Institute of Technology
Masaru KITAGAWA
AMSRC, Kanazawa Institute of Technology
Yasunobu KURODA
AMSRC, Kanazawa Institute of Technology
Eiji KUSANO
AMSRC, Kanazawa Institute of Technology
Akira KINBARA
AMSRC, Kanazawa Institute of Technology
Taizo KAWAUCHI
Institute of Industrial Science, Univ. of Tokyo
Katsuyuki FUKUTANI
Institute of Industrial Science, Univ. of Tokyo
Tatsuo OKANO
Institute of Industrial Science, Univ. of Tokyo
Shunji KISHIMOTO
KEK-High Energy Accelerator Research Organization
Xiaowei ZHANG
KEK-High Energy Accelerator Research Organization
Toyosei KAWASAKI
Department of Applied Physics, Waseda University
Daisuke SAKAI
Department of Applied Physics, Waseda University
Hiroshi ITOH
Department of Applied Physics, Waseda University
Takeo ICHINOKAWA
Department of Applied Physics, Waseda University
Chuhei OSHIMA
Department of Applied Physics, Waseda University
Toshuu AN
Department of Applied Physics, Waseda University
Hiroshi KUBO
Department of Electronic Science and Engineering, Kyoto University
Yasuhito GOTOH
Department of Electronic Science and Engineering, Kyoto University
Hiroshi TSUJI
Department of Electronic Science and Engineering, Kyoto University
Junzo ISHIKAWA
Department of Electronic Science and Engineering, Kyoto University
Youiti YAMAMOTO
JEOL Ltd.
Toshiaki MIYOKAWA
JEOL Ltd.
Nobuaki TAMURA
JEOL Ltd.
Tadao MIURA
Tanaka Solid Junction Project, ERATO/JST
Touru SUMIYA
Tanaka Solid Junction Project, ERATO/JST
Haruko FUJINUMA
Tanaka Solid Junction Project, ERATO/JST
Shun-ichiro TANAKA
Tanaka Solid Junction Project, ERATO/JST
Hiroyuki YOSHIKI
Tsuruoka National College of Technology
Teruhiko TSUTSUI
Department of Electrical and Electronic Engineering, Faculty of Engineering, Toyo University
Tetsu OKAMOTO
Department of Chemical Engineering, Faculty of Engineering, Tokai University
Seiichi WATANABE
Development Center, Kusado Works, Hitachi Ltd.
Yukio OKAMOTO
Department of Electrical and Electronic Engineering, Faculty of Engineering, Toyo University
Baio-Nano Electronics Research Center, Toyo University
Hiroki KAWADA
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
Kaoru IJIMA
Catalysis Research Center, Hokkaido University
Seigi MIZUNO
Catalysis Research Center, Hokkaido University
Saburo SHIMIZU
ULVAC JAPAN, Ltd.
Koh FUWA
ULVAC JAPAN, Ltd.
Seiji SEKI
ULVAC JAPAN, Ltd.
Seki Science Lab. Tsukuba Ltd.
Kazunobu HAYAKAWA
Catalysis Research Center, Hokkaido University
Heizo TOKUTAKA
Faculty of Engineering, Tottori University
Kazuyuki IWAMOTO
Faculty of Engineering, Tottori University
Kikuo FUJIMURA
Faculty of Engineering, Tottori University
Toru WATANABE
Faculty of Engineering, Tottori University
Satoru KISHIDA
Faculty of Engineering, Tottori University
Ken NAKAMURA
Electortechnical Laboratory
Yoshiyuki IGARI
Reseach Institute for Scientific Measurements, Tohoku Univ.
Shinji ISHIDZUKA
Reseach Institute for Scientific Measurements, Tohoku Univ.
Tetsuroh MINE
Reseach Institute for Scientific Measurements, Tohoku Univ.
Tsuyoshi TAKAOKA
Reseach Institute for Scientific Measurements, Tohoku Univ.
Tomohide TAKAMI
Reseach Institute for Scientific Measurements, Tohoku Univ.
Isao KUSUNOKI
Reseach Institute for Scientific Measurements, Tohoku Univ.
Akira HAYAMA
Department of Physics, Gakushuin University
Kazuyoshi IMOTO
Department of Physics, Gakushuin University
Takato HIRAYAMA
Department of Physics, Gakushuin University
Ichiro ARAKAWA
Department of Physics, Gakushuin University
Takashi ADACHI
Department of Physics, Gakushuin University
Koichiro MITSUKE
Department of Physics, Gakushuin University
Makoto SAKURAI
Institute for Molecular Science
Takashi MOMOSE
Miyagi National College of Technology
Eishuu HAYASAKA
Miyagi National College of Technology
Katsuhiro SAITOU
Miyagi National College of Technology
Katsuya NAGAYAMA
Miyagi National College of Technology
Sin'ya ABE
Shouwa Aluminum Co. Ltd.
Kunio OKIMURA
Fukui National College of Technology
Naoki YASUMARU
Fukui National College of Technology
Yukiko ABE
Institute for Molecular Science
Sin-ichi IGARASHI
Institute for Molecular Science
Yasuo IRIE
Institute for Molecular Science
Katsumi SUZUKI
Kagami Memorial Institute for Material Science and Technologies, Waseda University
Eiji ROKUTA
Kagami Memorial Institute for Material Science and Technologies, Waseda University
Tomohiro HAYASHI
Kagami Memorial Institute for Material Science and Technologies, Waseda University
Atsushi ITO
Kagami Memorial Institute for Material Science and Technologies, Waseda University
Chuhei OSHIMA
Kagami Memorial Institute for Material Science and Technologies, Waseda University
Toshio SAKURAI
Institute for Materials Research, Tohoku University
Masuaki MATSUMOTO
Institute for Molecular Science
Natsuo TATSUMI
Institute of Industrial Science, Univ. of Tokyo
Tadashi ITOYAMA
Institute of Industrial Science, Univ. of Tokyo
Masaomi UMEZAWA
Institute of Industrial Science, Univ. of Tokyo

JOURNAL FREE ACCESS

1998 Volume 41 Issue 3 Pages 335-400

DOI https://doi.org/10.3131/jvsj.41.335

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