Optimization of the Filament Position in the Cascade Static Lens Gauge

Abstract

Cascade Static Lens gauge (CSL gauge) is an ionization vacuum gauge that aims at a measurement of total pressure in extremely high vacuum region with high sensitivity by many repetition times of electrons. The experimental sensitivity of the CSL gauge depending on the filament position was investigated, and the optimum position was found. Computer simulation study of electron trajectories with the space charge has been carried out, and it was found that the repetition times of electrons had a same tendency to the experimental sensitivity.