Abstract
Low frictional coating films made of copper and boron nitride complex on a stainless steel substrate were successfully synthesized by magnetron co-sputter deposition with excimer laser irradiation. Frictional property of the films was observed by a vacuum friction measuring apparatus. The film properties were also obtained by a scanning auger electron spectroscopy, a Vikers hardness measuring apparatus and a contact angle measuring appatatus. Surface energy and film hardness were also modified by the laser irradiation. Friction coefficients as low as 0.075 under ultra-high vacuum conditions were achieved after irradiating the films.
