Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Electrostatic Chuck for Glass Substrate
Tetsuo KITABAYASHI
Author information
JOURNAL FREE ACCESS

2002 Volume 45 Issue 8 Pages 637-642

Details
Download PDF (2463K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© The Vacuum Society of Japan
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top