Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Multiple BN Delta-layers as the Reference Material forUltra-shallow Depth Profiling and Evaluation of the Sputtering Rate Variation
Yoshikazu HOMMA, Hisataka TAKENAKA
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2003 Volume 46 Issue 11 Pages 772-776

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