Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Electrical and Optical Properties of Transparent Conductive Films with Ag-Nd Alloy
Koichi SHIMADAKatsuhiko KOIKEShin FUKUDA
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2003 Volume 46 Issue 3 Pages 214-217

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Abstract
We investigated optical and electrical properties and durability in salt water of multilayer transparent conductive films with Ag-Nd alloy. By DC magnetron sputtering, we prepared three layer transparent conductive film with a structure of ITO/Ag-Nd alloy/ITO/substrate. As Ag-Nd alloy, we tried Ag-0.48 wt%Nd-0.60 wt%Au alloy and Ag-0.41 wt% Nd-0.56 wt%Cu alloy. We measured transmittance and sheet resistance of these transparent conductive films before and after dipping test in salt water. We found that before the dipping test, sheet resistance of the transparent conductive multilayer films with Ag-Nd alloy was almost the same as that with pure Ag. After the immersion of these transparent conductive films into salt water, we found that the durability of the transparent conductive film with Ag-Nd-Au alloy was superior to those with pure Ag and Ag-Nd-Cu alloy.
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© The Vacuum Society of Japan
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