Abstract
A thin zirconia electrolyte film using solid oxide fuel cell (SOFC) was prepared on the porous Al203 substrate by the microwave plasma-enhanced chemical vapor deposition (PECVD) using two organometallic compounds of zirconium acetylacetonate and zirconium tetra-n-butylate. Zr electrolyte film was characterized based on dependence on annealing treatment and substrate temperature. The grain size of a thin electrolyte film grown using zirconium tetra-n-butylate became small compared with that of zirconium acetylacetonate. As-deposited electrolyte film grown using two organometallic compounds indicated the columnar structure and but were deformed to crystal structure with a large crack or pore occurred at grain boundary in film by annealing treatment of 400°C. Furthermore, it is also found that a pore size in film reduced by crystal growth at a higher substrate temperature.
