Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Low Temperature Oxidation using Photon or Plasma Excited Oxygen Atoms and Its Application to Poly-Si Thin Film Transistor
Yukihiko NAKATA, Kazufumi AZUMA, Tetsuya OKAMOTO, Masashi GOTO, Atsusi SASAKI
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2004 Volume 47 Issue 5 Pages 357-363

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