Preprints of the National Meeting of JWS
the national meeting 2004 autumn
Session ID : 120
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Host: japan welding soceity

Fabrication of AlN coating onto quartz substrate by reactive RF plasma spraying
*Motohiro Yamada, Hajime Nakamura, Masahiro Fukumoto, Toshiaki Yasui, Koyata Takahashi
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Keywords: aluminum nitride, reactive spraying, redio frequency plasma, quartz
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[in Japanese]
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© 2004 by Japan Welding Society
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