Preprints of the National Meeting of JWS
Preprints of the National Meeting of JWS
Session ID : 452
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Host: Japan Welding Society

Electric properties of Ohmic contact formed on p-type 4H-SiC
*Yoshitaka Kimura, Masakatsu Maeda, Yasuo Takahashi
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Keywords: Power device, wide band-gap semiconductor, Ohmic contact, Amorphous film
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[in Japanese]
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© 2009 by Japan Welding Society
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