Environment
SF6 Pyrolysis Decomposition in N2 or O2 Bath Gas and the Influence of H2O Addition
2009 Volume 35 Issue 4 Pages 411-415
Details
2009 Volume 35 Issue 4 Pages 411-415
To develop SF6 decomposition technology which will contribute to the prevention of global warming, we investigated the decomposition of dilute SF6 in N2, O2 and Ar+H2O. Reaction parameters such as rate constants and activation energies of SF6 decomposition were evaluated.
SF6 decomposition was found to be a first-order reaction in N2, O2 and Ar+H2O bath gas. Apparent activation energies of SF6 decomposition were 386 and 446 kJ·mol−1 for N2 and O2 bath gas respectively. When H2O was added to Ar from 50 to 1000 ppm, the activation energies were 310±10 kJ·mol−1. Mass spectrum analysis of the decomposition components in SF6+O2 gas mixture at 1373 K revealed the presence of SO, SO2, SOF, SO2F, SOF2 and SO2F2.
