Atomic Resolution Secondary Electron Imaging with Aberration Corrected Scanning Transmission Electron Microscope

Abstract

Sub-nanometer atomic scale characterization has been applied widely with aberration-corrected electron microscopy. We have been studying atomic-resolution secondary electron imaging with aberration-corrected scanning transmission electron microscope. As a result of a series of experiments, we have succeeded in observing isolated single uranium atoms using secondary electron signals. In addition, we observed atomic-resolution images not only for heavy elements like uranium but also light ones like silicon and carbon.