Structural Evolution and Crystallization of Amorphous Germanium Films Prepared by Vapor Deposition

Abstract

We found that electron-radiation-induced crystallization microstructure of sputter-deposited amorphous germanium films varies with aging of the amorphous films at room temperature. The analysis in terms of pair distribution function revealed that amorphous structure changes systematically with aging up to several months. In this review, we discussed the relationship between amorphous structure and crystallization microstructure based on the experimental and computational results.