Basics and Recent Development for Digital Camera in Electron Microscopy

Abstract

Digital camera is the key instrument for modern electron microscopy. Different from traditional negative films, it enables online data evaluation and feedback to the microscope. For example, automated alignment requires images as an input data from misaligned and aligned conditions, and automated data acquisition needs corrections for feature tracking, focusing, and related alignment. By the recent development in the sensor technology, we are now migrating from CCD based camera to CMOS based camera. CMOS sensor has a capability to speed up the frame rate without sacrificing image resolution. This feature opens a way to the application requiring time resolution like in-situ imaging. And now the direct detection detector (DDD) technology expands the application field from cryo electron microscopy to material science field. The key performance of DDD enhances by electron counting processing. It eliminates the image blurring caused by point spread function and unwanted noises. The technology is now applying in in-situ imaging and electron energy loss spectroscopy.