2011 Volume 77 Issue 782 Pages 3597-3607
Demands for measuring three-dimensional (3D) micro-geometries over a large scanning range have recently increased in a various industries such as aerospace, dies and molds, energy, etc. This paper presents a newly developed 3D profile measuring system with both a large scanning range (18mm×18mm×10mm) and a nanometer resolution. The profile measuring system developed is consisted of an AFM probing system and a newly developed 3D nano-motion system with a large travel range. Elimination of motion errors in the nano-motion system enables the AFM probe to scan a specimen with a nanometer resolution. The measurement results of an optical lens confirmed that the developed system achieves high measurement accuracy over a large scanning range.
Transactions of the Society of Mechanical Engineers
Transactions of the Japan Society of Mechanical Engineers
Transactions of the Japan Society of Mechanical Engineers Series A
Transactions of the Japan Society of Mechanical Engineers Series B
Transactions of the Japan Society of Mechanical Engineers Series C
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B
