2013 Volume 79 Issue 798 Pages 276-288
In the precision measurement and positioning fields, e.g. the semiconductor exposure machine, an air type anti-vibration apparatus is widely implemented. The above machine must continuously operate because of a high price. However, when an earthquake occurs, in almost case, the anti-vibration apparatus becomes shutdown in order to avoid mechanical contact. In order to operate continuously, we previously proposed a switching control scheme by using the changeover concerning floor vibration feedforward and/or feedback parameters. In order to be applicable for various earthquakes, we propose a modified switching control scheme such that the acceleration, displacement, and two kinds of SI values are simultaneously utilized for both switching and recovering. Moreover, for massive earthquakes shutdown switch is prepared. Simulated results using earthquake examples show the effective of proposed scheme.
Transactions of the Society of Mechanical Engineers
Transactions of the Japan Society of Mechanical Engineers
Transactions of the Japan Society of Mechanical Engineers Series A
Transactions of the Japan Society of Mechanical Engineers Series B
Transactions of the Japan Society of Mechanical Engineers Series C
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B
