Large Scale Active Microvibration Control System Using Piezoelectric Actuators Applied to Selmiconductor Manufacturing Equipment

Abstract

This paper verifies the performance of the active microvibration control system using piezoelectric actuators with a table length of 3 m, a width of 1.8 m and a weight of 4000kg applied to large-scale semiconductor manufacturing equipment whose microlithographic accuracy was actually degraded due to the constant vibration. The mounted equipment was the integral-design semiconductor manufacturing equipment weighting 2600 kg. The controller was designed by a method dependent on the normalized coprime factor plant model in the preceding study used to prevent the elastic vibration of the equipment and table from causing the spillover phenomena of the control system. For the frequency-forming algorithm, the model matching method and the H^∞ method were employed. As a result of this system's application, the microlithographic accuracy of the manufacturing equipment could be improved from about 2μm (before application) to an intrinsic value of nearly 0.1 μm.