Adhesive Force acting on Micro Objects

Abstract

In this paper, the adhesive force acting on micro objects is discussed. The origin of the adhesion is generally considered to be van der Waals force, surface tension force, and electrostatic force. We found that electrostatic force due to native charge dominates the adhesion of small metal particles at the humidity of 25%. Furthermore, the relationship between surface roughness and electrostatic force is measured by micro force measurement system. The model of electrostatic force acting on rough surface is also shown.